Study of electron energy distribution functions (EEDFs) in three DC low-pressure plasma sources

In the present paper the possibility oi application of the regularization m ethod for reliable determination of the position and form of structural fea tures of electron energy distribution is considered. The regularization met hod is used in the processing of the probe characteristics, measured in gas discharge chambers of broad beam gridded Xe ion sources, with peripheral a nd with divergent magnetic fields, as well as in an ion accelerator with cl osed electron drift. Electron energy distribution functions with secondary maxima are observed in the plasma devices.