Thin-film micromirror array for high-brightness projection displays

The thin-film micromirror array (TMA) is a new reflective-type light modula tor that uses thin film piezoelectric actuators in conjunction with micromi rrors by surface micromachining technology. The TMA optical system is desig ned based on Schlieren optics and the module is fabricated by a conventiona l integrated circuit (IC) process. The design of thr TMA has evolved to enh ance the optical performance as well as mechanical uniformity and electrica l reliability. The hidden actuator design TMA has a fill factor (FF) of ove r 90% and a module light efficiency (MLE) of 65%. A working prototype of a video graphics array (VGA) format TMA display system with three modules sho ws more than 7 lumen per walt light efficiency.