Fabrication of microcantilever with a silicon tip prepared by anodization

The fabrication process of a microcantilever with a silicon tip prepared by anodization for an atomic force microscope(AFM) is demonstrated. The silic on tip having a high aspect ratio can be prepared using preferential anodiz ation of a silicon wafer with n/p junction. The microcantilever is fabricat ed by patterning a silicon nitride film deposited on the anodized wafer. Th e silicon tip is examined by observing the surface morphology of an anisotr opically etched silicon step and the grains of a vacuum evaporated Au film.