Enhancement of emission characteristics for field emitters by N-doped hydrogen-free diamond-like-carbon coating

The nitrogen-doped diamond-like-carbon (DLC) coating on the molybdenum fiel d emitter arrays (Mo-FEAs) was reported to improve the electron emission ch aracteristics. The plasma enhanced chemical vapor deposition method using a layer-by-layer technique was applied to deposit DLC films. Field emission characteristics were measured and the possibility of applying N-doped DLC c oated emitters to high frequency vacuum devices was reported. The turn-on v oltage of DLC coated FEAs was decreased from 75 to 55 V and the emission cu rrent was more stable than that of noncoated FEAs. The total transconductan ce of FEAs was increased and the effective work function of emitters was re duced by the N-type DLC coating. (C) 1999 American Vacuum Society. [S0734-2 11X(99)02101-0].