SI C PHASES FROM THE IR LASER-INDUCED DECOMPOSITION OF 1,4-DISILABUTANE/

Authors
VOLNINA EA KUPCIK J BASTL Z SUBRT J GUSELNIKOV LE POLA J
Citation
Ea. Volnina et al., SI C PHASES FROM THE IR LASER-INDUCED DECOMPOSITION OF 1,4-DISILABUTANE/, Journal of materials chemistry, 7(4), 1997, pp. 637-640
Citations number
43
Categorie Soggetti
Chemistry Physical","Material Science
Journal title
Journal of materials chemistry → ACNP
ISSN journal
09599428
Volume
7
Issue
4
Year of publication
1997
Pages
637 - 640
Database
ISI
SICI code
0959-9428(1997)7:4<637:SCPFTI>2.0.ZU;2-O
Abstract
CO2 laser-induced decomposition of 1,4-disilabutane (DSB) in the gas p hase yields gaseous C1-2 hydrocarbons and RSiH3 compounds (R = H, CH3, C2H5 and C2H3), and it represents a convenient process for chemical v apour deposition of thin films composed of Si/C/H, Si/C and Si compone nts.