Ion implantation into the interior surface of a steel tube by plasma source ion implantation

A plasma source ion implanter (PSII) for the surface modification of the in terior of steel tubes was developed. A 2.45 GHz microwave was fed into a tu bular vacuum chamber through a flexible coaxial cable and supplied to an an tenna. A one kilogauss magnetic field was generated by a solenoidal coil. A 35 mm inner diameter and 1 m length stainless steel tube was fixed inside the chamber. A nitrogen and acetylene plasma was produced by an ECR dischar ge. A high negative voltage pulse was applied directly to the steel tube. D uring the implantation the solenoidal coil was moved along the axis directi on of the chamber to make uniform implantation. The compositional and struc tural characterization of the interior surface of the tube was carried out using Auger electron spectroscopy. Structural information of the carbon fil ms prepared by acetylene PSII was obtained by Raman spectroscopy. The resul ts showed that uniform ion implantation into the interior surface of the tu be was achieved by the PSII. (C) 1999 Elsevier Science B.V. All rights rese rved.