We have employed deep level transient spectroscopy (DLTS) to study the elec
trical properties of 5.4-MeV I-le-ion irradiation induced electron traps. E
R3-ER5. in epitaxially grown GaN. These main defects ER3-ER5, are positione
d at E-C - 0.20 eV. E-C - 0.78 eV and E-C - 0.95 eV. respectively. Previous
studies showed that electron emission from ER3 exhibited an electric field
enhancement not characteristic of a Poole-Frenkel effect. Based on this an
d the true capture cross section of ER3. we suggest that ER3 is an acceptor
-like defect. (C) 1999 Elsevier Science B.V. All rights reserved.