Preparation of hydrophobic diamond like carbon films by plasma source ion implantation

Fluorinated diamond like carbon (DLC) films were deposited from fluorobenze ne and hexafluorobenzene by plasma source ion implantation (PSII) on silico n wafer and stainless steel substrates. The plasma was generated by a radio frequency glow discharge. The implantation and coatings were carried out a t a target bias voltage of -20 kV and repetition rates 100 Hz and 1 kHz. Th e compositional and structural characterization of the films was carried ou t using Fourier transform infrared spectroscopy (FT-IR), X-ray photoelectro n spectroscopy (XPS) and Raman spectroscopy. The water contact angle was me asured to estimate the hydrophobic property of the DLC films. The hardness of the films was measured by an indentation method. The corrosion resistanc e was determined by cyclic voltammetry measurements. The XPS and FT-IR anal ysis showed the presence of C-F and C-C bonds. The DLC film prepared from h exafluorobenzene showed a high contact angle of about 100 degrees. The hydr ophobic film has beneficial effects on the suppression of corrosion. (C) 19 99 Elsevier Science B.V. All rights reserved.