Temperature dependence of ion-beam induced amorphization in alpha-quartz

The temperature dependence of the amorphization in alpha-quartz by Ne-ion b ombardment has been investigated using Rutherford Backscattering Spectromet ry in channeling geometry (RBS-C). The experimental results show that the c ritical temperature T-c for inhibiting amorphization in quartz is around 94 0 K. The damage depth profile chi(z, phi) is independent of. the temperatur e and fluence and can be simulated with a power-law function [chi(z, phi) p roportional to (phi F-D(z))(3)] of the damage energy distribution F-D(z). A t low irradiation temperature, the critical dose phi(c) for amorphization i s independent of the temperature but it strongly increases at higher temper atures with an activation energy of 0.28 eV and has been explained by out-d iffusion model of Morehead and Crowder. (C) 1999 Elsevier Science B.V. All rights reserved.