Low energy ion implantation is known to improve chemical and mechanical sur
face properties of metals. This treatment is often used to enhance wear and
corrosion resistance or mechanical life-time of fatigue test of stainless
steel or titanium alloys. The aim of this work is to investigate these effe
cts at higher energy, for which deeper (and still not well understood) modi
fications occur. High fluence (10(18) cm(-2)) N-15 and N-14 implantations a
t 1 MeV have been performed in the 316LL stainless steel and some specimen
have been annealed in the 200-500 degrees C temperature range. Nitrogen con
centration distribution, structure, morphology and microhardness have been
examined with Nuclear Resonance Analysis. Grazing Incidence X-Ray Diffracti
on and Nanoindentation, respectively. Precipitates of steel and chromium ni
tride phases and a superficial martensitic transformation can be observed,
leading to a significant increase of hardness. The best result is obtained
after one hour annealing at 425 degrees C, due to a larger and more homogen
eous repartition of nitride species. In this case, a near surface accumulat
ion is observed and explained in terms of diffusion and precipitation mecha
nisms. (C) 1999 Elsevier Science B.V. All rights reserved.