Plasma-immersion ion implantation (PIII) and high-current ion implantation
(HCII) of nitrogen into M2 steel were carried out. The formation of a multi
layer system consisting of a surface layer of austenite on top of epsilon-F
e3N nitride precipitates was manifested in M2 steel after PIII. HCII forms
a thick (more than 14 mu m) layer with epsilon-Fe3N precipitates. Apparentl
y, the formation of the austenite layer after PIII is connected with a loca
l tempering of the steel surface by the pulsed nitrogen ion beam. (C) 1999
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