Optical study of the alpha-GaN/GaAs interface properties as a function of MBE growth conditions

Citation
S. Shokhovets et al., Optical study of the alpha-GaN/GaAs interface properties as a function of MBE growth conditions, SEMIC SCI T, 14(2), 1999, pp. 181-186
Citations number
14
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
ISSN journal
02681242 → ACNP
Volume
14
Issue
2
Year of publication
1999
Pages
181 - 186
Database
ISI
SICI code
0268-1242(199902)14:2<181:OSOTAI>2.0.ZU;2-T
Abstract
Undoped hexagonal GaN films have been grown by molecular beam epitaxy on (1 11)B GaAs substrates. Both Ga flux and nitrogen plasma conditions were fixe d, while the growth temperature was varied in the range from 650 up to 720 degrees C. Reflectivity measurements below and above the GaN band gap were employed in order to determine optical parameters characterizing the substr ate/film interface properties. The refractive index of the interface layer was found to decrease with increasing growth temperature indicating the for mation of a mixed medium in this region. This effect is related to the colu mnar growth of GaN and outdiffusion of substrate atoms via channels between the columns which promotes the formation of voids in the substrate/film in terface. Low temperature initiated growth or nitridation of the substrate w ere observed to reduce the influence of elevated growth temperatures.