S. Shokhovets et al., Optical study of the alpha-GaN/GaAs interface properties as a function of MBE growth conditions, SEMIC SCI T, 14(2), 1999, pp. 181-186
Undoped hexagonal GaN films have been grown by molecular beam epitaxy on (1
11)B GaAs substrates. Both Ga flux and nitrogen plasma conditions were fixe
d, while the growth temperature was varied in the range from 650 up to 720
degrees C. Reflectivity measurements below and above the GaN band gap were
employed in order to determine optical parameters characterizing the substr
ate/film interface properties. The refractive index of the interface layer
was found to decrease with increasing growth temperature indicating the for
mation of a mixed medium in this region. This effect is related to the colu
mnar growth of GaN and outdiffusion of substrate atoms via channels between
the columns which promotes the formation of voids in the substrate/film in
terface. Low temperature initiated growth or nitridation of the substrate w
ere observed to reduce the influence of elevated growth temperatures.