SMART: An aberration-corrected XPEEM/LEEM with energy filter

Citation
R. Wichtendahl et al., SMART: An aberration-corrected XPEEM/LEEM with energy filter, SURF REV L, 5(6), 1998, pp. 1249-1256
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
SURFACE REVIEW AND LETTERS
ISSN journal
0218625X → ACNP
Volume
5
Issue
6
Year of publication
1998
Pages
1249 - 1256
Database
ISI
SICI code
0218-625X(199812)5:6<1249:SAAXWE>2.0.ZU;2-1
Abstract
A new UHV spectroscopic X-ray photoelectron emission and low energy electro n microscope is presently under construction for the installation at the PM -6 soft X-ray undulator beamline at BESSY II. Using a combination of a soph isticated magnetic beam splitter and an electrostatic tetrode mirror, the s pherical and chromatic aberrations of the objective lens are corrected and thus the lateral resolution and sensitivity of the instrument improved. In addition a corrected imaging energy filter (a so-called omega filter) allow s high spectral resolution (Delta E = 0.1 eV) in the photoemission modes an d background suppression in LEEM and small-spot LEED modes. The theoretical prediction for the lateral resolution is 5 Angstrom; a realistic goal is a bout 2 nm. Thus, a variety of electron spectroscopies (XAS, XPS, UPS, XAES) and electron diffraction (LEED, LEEM) or reflection techniques (MEM) will be available with spatial resolution unreached so far.