Growth and characterization of silicon crystallites on laser structured glass

Selective growth of silicon crystallites on glass, seeded from silicon satu rated metallic solution droplets is demonstrated. These droplets are deposi ted in micropore arrays which are generated in the glass substrate by ultra short laser pulses. In this way, an equidistant distribution of crystallite s can be achieved by preferred nucleation in the micropores. Additionally, a crystallite selection occurs corresponding to the tip geometry. The mater ial transport is governed by the vapour-liquid-solid (VLS) mechanism. The m orphological characterization of micropores and grown crystallites is perfo rmed by Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) a nd Focused Ion Beam (FIB) method.