Terahertz time-domain spectroscopy of films fabricated from SU-8

Authors
Arscott, S Garet, F Mounaix, P Duvillaret, L Coutaz, JL Lippens, D
Citation
S. Arscott et al., Terahertz time-domain spectroscopy of films fabricated from SU-8, ELECTR LETT, 35(3), 1999, pp. 243-244
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONICS LETTERS
ISSN journal
00135194 → ACNP
Volume
35
Issue
3
Year of publication
1999
Pages
243 - 244
Database
ISI
SICI code
0013-5194(19990204)35:3<243:TTSOFF>2.0.ZU;2-N
Abstract
Terahertz time-domain spectroscopy has been used to characterise the refrac tive index and absorption coefficient of samples fabricated using the negat ive photoresist SU-8, in the frequency range 0.1-1.6THz. At a frequency of 1THz, the corresponding dielectric constant and dielectric loss tangent are 2.9 and 6.3 x 10(-6), respectively.