X-ray scattering by nano-particles within granular thin films, investigation by grazing angle X-ray reflectometry

It is shown here that the observation of the phenomenon of like small angle scattering of X-rays in very thin heterogeneous films: can be made compara tively easily by using grazing angle reflectometry of X-rays. The feasibili ty was achieved with co-sputtered thin films of approximately 600 Angstrom thickness, made up by crystalline platinum clusters embedded in an amorphou s alumina matrix. The experimental reflectivity profiles are simulated by t he intensity superposition of two components: (i) the specular part caused by the usual interference phenomenon between the partial waves reflected fr om the air-film and film-substrate interfaces; and (ii) the like-small angl e scattering part due to diffraction by platinum clusters. It is found that the shape of such clusters is spherical characterized by mean values of di ameter [phi(c)] and inter-cluster distance [S-c] of the order 29 Angstrom a nd 45 Angstrom respectively with standard deviations sigma(phi) and sigma(s ) of title order of 3 Angstrom. Such an observation of both the interferenc e and diffraction phenomena indicates that the thin granular film exhibits both its continuous and heterogeneous aspects together.