Development of a high repetition rate Nd : YAG slab laser and soft X-ray generation by cryogenic target

Authors
Amano, S Shimoura, A Miyamoto, S Mochizuki, T
Citation
S. Amano et al., Development of a high repetition rate Nd : YAG slab laser and soft X-ray generation by cryogenic target, FUSION ENG, 44, 1999, pp. 423-426
Citations number
7
Categorie Soggetti
Nuclear Emgineering
Journal title
FUSION ENGINEERING AND DESIGN
ISSN journal
09203796 → ACNP
Volume
44
Year of publication
1999
Pages
423 - 426
Database
ISI
SICI code
0920-3796(199902)44:<423:DOAHRR>2.0.ZU;2-#
Abstract
High repetition rate (320 pps), high average power (100 W) pulse Nd:YAG sla b laser has been developed for x-ray driver. A strong X-ray emission around 10.8 nm, which wavelength is attractive for x-ray projection lithography, was generated from cryogenic Xe targets pumped by this laser pulses. CO2 an d H2O were also tested for cryogenic targets and we found that the emission intensity from Xe around this wavelength region was at least 10 times high er than that from H2O, CO2. (C) 1999 Elsevier Science S.A. Ail rights reser ved.