Deposition of diamond like carbon (DLC) films on YBCO superconducting detec
tors is reported. The method is to make a DLC film by C+ implantation and X
eCl excimer laser irradiation. The implantation energy is 20-35 keV and Cimplantation dosages D = 1 x 10(14)-5 x 10(18) ions/cm(2). The parameters o
f XeCl excimer laser ablation are: wavelength 308 nm; energy density, 20-50
mJ/cm(2); and width of pulse, 45 ns. The superconductivity of C+-implanted
YBCO is also investigated, while the damage behavior of C+ implantation an
d the mechanism of coating DLC are analyzed. (C) 1999 Elsevier Science B.V.
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