SYNTHESIS AND CHARACTERIZATION OF NANOSIZED TITANIUM-OXIDE FILMS ON THE (0001)ALPHA-AL2O3 SURFACE

Titanium oxide thin films on the (0001) alpha-Al2O3 surface were synth esized by the method of molecular layering. Atomic force microscopy an alysis showed changes in surface morphology when titanium oxide film w as formed. On the clean surface of substrate there were only 'macrosiz e' features with dimensions of 40-100 nm in the plane of the surface a nd 1.5-2 nm in height, whereas after the first cycle of synthesis a 'n anoroughening' with a height of 0.4-0.8 nm appeared. Dimensions of 'na norelief' elements were in the range of 1-10 nm. During next cycles of synthesis a decreasing of nanorelief height was observed. The film th ickness estimated by the ellipsometry measurements as a function of th e synthesis cycle number was obtained. The increase in the film thickn ess per growth cycle was 0.25 nm. The model of titanium oxide film gro wth on (0001) alpha-Al2O3 surface was identified by means of angle-res olved X-ray photoelectron spectroscopy investigation.