Influence of substrate nature on the microstructure of LPCVD silicon films

Authors
Caussat, B Couderc, JP Scheid, E Bourgerette, C de Mauduit, B
Citation
B. Caussat et al., Influence of substrate nature on the microstructure of LPCVD silicon films, J MAT SCI L, 17(22), 1998, pp. 1899-1901
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE LETTERS
ISSN journal
02618028 → ACNP
Volume
17
Issue
22
Year of publication
1998
Pages
1899 - 1901
Database
ISI
SICI code
0261-8028(19981115)17:22<1899:IOSNOT>2.0.ZU;2-A