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ITA
ENG
Adhesion property of copper nitride film to silicon oxide substrate
Authors
Chwa, SO
Kim, KH
Citation
So. Chwa et Kh. Kim, Adhesion property of copper nitride film to silicon oxide substrate, J MAT SCI L, 17(21), 1998, pp. 1835-1838
Citations number
12
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE LETTERS
ISSN journal
02618028 →
ACNP
Volume
17
Issue
21
Year of publication
1998
Pages
1835 - 1838
Database
ISI
SICI code
0261-8028(19981101)17:21<1835:APOCNF>2.0.ZU;2-M