MECHANICAL-PROPERTIES OF RF MAGNETRON-SPUTTERED INDIUM TIN OXIDE-FILMS

In this study, the mechanical behavior of r.f. magnetron sputtered ind ium tin oxide (ITO) films with glass and polycarbonate as substrates w as investigated. The microhardness, pull-off strength and scratch adhe sion strength were measured to assess the film properties. The ITO coa ting improves the hardness of the polycarbonate substrate. Incorporati on of oxygen in the sputtering ambient enhances the crystallization of the film; consequently, the film hardness of coated polycarbonate and the scratch adhesion strength of coated glass are improved. The therm al expansion mismatch between ITO and polycarbonate results in poor ad hesion when polycarbonate is employed as the substrate.