I. Tittonen et al., Interferometric measurements of the position of a macroscopic body: Towards observation of quantum limits, PHYS REV A, 59(2), 1999, pp. 1038-1044
An optomechanical sensor suitable for the study of quantum effects has been
developed and characterized. The sensor reads out the vibrations of a micr
ofabricated miniature silicon mechanical oscillator which forms one end mir
ror of a high finesse Fabry-Perot cavity. The mechanical quality factor is
up to Q = 300 000 at 300 K and rises up to Q = 4 x 10(6) at 4 K. The therma
l noise of the oscillator has been measured in the time and frequency domai
ns at room temperature and at 4.5 K. The prospects for observing the standa
rd quantum limit are discussed. [S1050-2937(99)07002-X].