We study the interfacial properties of thin amorphous carbon films frown on
silicon (100) substrate. By combining experimental spectroscopic ellipsome
try and stress measurements and theoretical Monte Carlo simulations, we sho
w that significant interdiffusion takes place at the initial stages of grow
th, driven by a strain mediated mechanism, and we identify the relevant ato
mistic processes. [S0163-1829(99)06507-8].