I. Lindseth et A. Bardal, Quantitative topography measurements of rolled aluminium surfaces by atomic force microscopy and optical methods, SURF COAT, 111(2-3), 1999, pp. 276-286
We have compared the results of quantitative topography measurements on typ
ical industrial, rolled or etched aluminium surfaces, using three different
methods that can measure surface features in the 10-mu m to sub-micrometre
range. The methods used, atomic force microscopy (AFM), white-light interf
erometry, and confocal laser scanning microscopy (LSM), utilize very differ
ent mechanisms of image formation. We find good agreement between data meas
ured by AFM and by white-light interferometry. The two techniques complemen
t each other. AFM is not limited to reflecting samples, it has a better res
olution than interferometry, and it can measure steeper slopes. White-light
interferometry is faster and allows larger areas to be analysed, and data
from neighbouring areas can be spliced more easily. When used on strongly r
eflecting, rolled or etched aluminium surfaces, LSM yields results that dev
iate strongly from those of the other two methods and from the true sample
surface topography. (C) 1999 Elsevier Science S.A. All rights reserved.