The stress development in zirconium oxide gel films during annealing betwee
n 150 and 400 degrees C has been investigated using thickness and substrate
curvature measurements with laser beam reflections. The films' elemental c
ontent was determined by Rutherford backscattering spectrometry and their s
tructure by X-ray diffraction. It is shown that the main densification mech
anisms are polycondensation reactions up to 300 degrees C with acetylaceton
e elimination leading to a rather weak stress increase. For temperatures ab
ove 300 degrees C the vanishing of acetylacetone favors densification and s
tress increase. (C) 1999 Elsevier Science S.A. All rights reserved.