Chopping effect on the crystallinity of ZnO films prepared by a r.f. planar magnetron sputtering method

Authors
Han, BM Chang, S Kim, SY
Citation
Bm. Han et al., Chopping effect on the crystallinity of ZnO films prepared by a r.f. planar magnetron sputtering method, THIN SOL FI, 338(1-2), 1999, pp. 265-268
Citations number
19
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
338
Issue
1-2
Year of publication
1999
Pages
265 - 268
Database
ISI
SICI code
0040-6090(19990129)338:1-2<265:CEOTCO>2.0.ZU;2-F
Abstract
We have investigated the chopping effect on the crystallinity of the ZnO fi lms prepared by using a modified r.f. planar magnetron sputtering method, w here the sputtering process is periodically chopped. In the experiment we h ave found that if the deposition and pause time is chosen optimally for the renucleation of ZnO grains, a highly c-axis-oriented ZnO film with a large crystallite size can be grown on the SiO2/Si(100) substrate. (C) 1999 Else vier Science S.A. All rights reserved.