Reduced density function analysis using convergent electron illumination and iterative blind deconvolution

Previously reduced density function analysis in an electron microscope was restricted to diffraction patterns formed from parallel electron illuminati on. Through the use of deconvolution techniques, we are able to extend redu ced density function analysis to include diffraction patterns formed with c onvergent electron illumination. This allows the investigation of smaller s pecimen volumes than is possible with parallel electron illumination. We co mpare the deconvolution results of iterative blind deconvolution and maximu m entropy to highlight the effectiveness of iterative blind deconvolution, in situations where an accurate measurement of the point spread function is not available. (C) 1999 Elsevier Science B.V. All rights reserved.