It is shown that hydrogen passivation by the photochemical vapor deposition
method can have a significant influence on GaInP/GaAs heterostructures. Th
e effect has been investigated by low-temperature photoluminescence and cur
rent-voltage and capacitance-voltage experiments. The photoluminescence mea
surement shows a strong increase in the luminescence intensity after hydrog
enation. It is interpreted in terms of the passivation of nonradiative reco
mbination defect centers by atomic hydrogen. The effect is also accompanied
by a simultaneous decrease in the carrier concentration as shown from the
capacitance-voltage measurements. In addition, the effect of hydrogenation
is confirmed by the improvement of the Schottky-diode properties. These res
ults provide concrete evidence to support the passivation of impurities and
defects by atomic hydrogen in GaInP/GaAs heterostructures. (C) 1999 Americ
an Institute of Physics. [S0003-6951(99)04310-7].