Noncontact atomic force microscopy with frequency modulation detection is a
promising technique for surface observation with true atomic resolution. T
he piezoelectric material itself can be an actuator and sensor of the oscil
lating probe simultaneously, without the need for additional electro-mechan
ical transducers or other measurement systems. A vertical resolution of 0.0
1 nm rms has been achieved using a microfabricated cantilever with lend zir
conate titanate thin film in noncontact mode frequency modulation detection
. The cantilever also has a sharpened pyramidal stylus with a radius of abo
ut 10 nm for noncontact atomic force microscopy. (C) 1999 Elsevier Science
B.V. All rights reserved.