In situ cleaved (110) surfaces of n-doped GaAs have been investigated by sc
anning tunneling microscopy (STM) and spectroscopy (STS) at temperatures fr
om 8 K to 300 K. At low temperatures oscillatory features in the topography
around individual donor atoms embedded in the GaAs matrix and peaks in the
differential conductivity (dI/dU) curves are seen. Both vanish with increa
sing temperature. The experimental results are described consistently in th
e framework of quantized subbands of a low-dimensional electron gas within
the band-bending region which is induced by the STM tip. The quantization o
ccurs at unpinned semiconductors surfaces and is also relevant for a quanti
tative understanding of STM data at room temperature.