Analytical representation of collision integrals for the (m-6) Lennard-Jones potentials in the EPIDIF database

Based on the requirements of the EPIDIF database as regards the interaction potentials and the diffusion coefficients of species of gas-phase epitaxy of novel materials, the choice is justified of the set of the collision int egrals, of the range of reduced temperatures, and of the desired accuracy o f approximation of tabulated data. For the set of three-parameter m-6 Lenna rd-Jones potentials, the main collision integrals are approximated in the r ange of reduced temperatures T* = 0.4-200 and, for the first time, in almos t the entire range of the exponent m = 8-infinity with the standard deviati on of 0.075-0.085%. The models and their parameters are introduced to the E PIDIF database and used to analyze the surface of the binary diffusion coef ficient as a function of the variables T* and m.