Experimental method for the determination of the energy distribution of stress-induced oxide traps

Authors
Spinelli, AS Lacaita, AL Rigamonti, M Ghidini, G
Citation
As. Spinelli et al., Experimental method for the determination of the energy distribution of stress-induced oxide traps, IEEE ELEC D, 20(3), 1999, pp. 106-108
Citations number
16
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE ELECTRON DEVICE LETTERS
ISSN journal
07413106 → ACNP
Volume
20
Issue
3
Year of publication
1999
Pages
106 - 108
Database
ISI
SICI code
0741-3106(199903)20:3<106:EMFTDO>2.0.ZU;2-Z
Abstract
An experimental procedure for the determination of the energy distribution of oxide neutral traps is presented, showing the evolution of the stress-in duced damage as a function of Fowler-Nordheim stress fluence and field. It is shown that the traps are mainly distributed around 2 eV from the oxide c onduction band. Results are presented for different oxide technologies, inv estigating the effect of oxide nitridation and growth conditions on the tra p energy distribution.