Layout has strong influence on matching properties of a circuit. Current ma
tching models, which characterize both local random non-uniformities and gl
obal systematic nonuniformities stochastically, are not adequate for the ma
tching analysis taking the effect of layout realization into account. In or
der to consider topological information of layout into matching analysis, w
e propose a matching model which treats the random and systematic component
s separately. Also, we characterize the micro-loading effect, which modulat
es fabricated line-width according to the local density of layout patterns,
into matching analysis. With these two techniques, we can perform matching
analysis of CMOS circuits taking layout information into account.