Design of coplanar waveguide multilayer square spiral inductors for monolithic microwave integrated circuits

A square indicator using multilayer coplanar waveguide transmission lines o n a GaAs fabricated by using monolithic microwave integrated circuits (MMIC ) technology is presented. The polyimide layer formation, curing and dry et ching processes are used in an attempt to obtain high quality dielectric la yers suitable for MMIC applications. The experimental fabrication progress provides two metal layers with two polyimide spacer dielectric layers. A br ief overview of the electromagnetic design process is included. The perform ance of the proposed spiral inductor is investigated experimentally and wit h electromagnetic simulations (Sonnet em) up to 20 GHz using RF-on mater me asurements. A very good agreement is achieved, despite the highly three-dim ensional nature of the structure. (C) 1999 John Wiley & Sons, Inc.