K. Kawasaki et al., Single-electron devices formed by self-ordering metal nanodroplet arrays on epitaxial CaF2 film, JPN J A P 1, 38(1B), 1999, pp. 418-420
Single-electron devices using a self-ordering metal nanodroplet array as mu
ltitunneling junctions (MTJ) were fabricated. The nanodroplet array was fab
ricated by sequential deposition of Al and Ga on a epitaxial CaF2 him grown
on Si substrate, so that the Ga/Al droplets were aligned along the CaF2 st
ep edges. Current-voltage characteristics of an MTJ diode and an MTJ transi
stor showed a Coulomb staircase at 55 K and 287 K, respectively. A large Co
ulomb gap observed on a source-drain current indicates that electrons tunne
l a large number of nanodroplet arrays.