Role of electron thermal motion in evanescent electromagnetic wave structure of inductively coupled plasma

The role of electron thermal motion in radio-frequency (RF) plasma produced by a planar, spiral antenna was examined. The measured evanescent wave amp litude and the phase were compared to the calculated results obtained from a one-dimensional collisionless (nonlocal) model, changing the boundary con dition, Ar filling pressure and RF frequency. It was demonstrated that elec tron thermal motion plays a more important role under the condition of low collisionality.