Structural, optical and electrical properties of undoped and indium doped zinc oxide prepared by spray pyrolysis

Thin films of transparent undoped and indium doped ZnO have been deposited using the spray pyrolysis technique. The structural, optical properties and electrical resistivity of these films are investigated as a function of su bstrate temperature and indium concentration in the solution. X-ray diffrac tion showed that the films prepared at substrate temperature greater than 3 00 degrees C exhibit the hexagonal wurtzite structure with a preferential o rientation along the (002) direction, Indium doping changes the orientation of grains to the (110) direction. This result is confirmed by SEM, The com position of the films is also examined by XPS, High transmittance (80 %) in the visible region and low resistivity of about 10(-1) Omega.cm at room te mperature are obtained for thin films prepared under optimum deposition con ditions: Ts=450 degrees C and In/Zn = 2 at.%.