A coplanar waveguide(CPW) was fabricated on n-type GaP substrate, leakage c
urrent loss of the CPW was decreased by proton-bombardment. Microwave from
1 similar to 5GHz was measured by the CPW electro-optic sampling with multi
ple frequency phase-shift scanning system. Measurements of proton-bombarded
GaP CPW gave resistance value four orders greater than that of un-bombarde
d. The system has a 10 mV/root Hz sensitivity as the microwave frequency wa
s 2.30 GHz.