Improved operation of micromechanical comb-drive actuators through the useof a new angled comb finger design

An original design for a new comb finger structure to be used in electrosta tically driven actuator devices is presented and experimentally demonstrate d. The new design is seen as one viable alternative to the already prevalen t rectangular comb finger design and can be considered as a crossbreed betw een a conventional comb finger design (theta = 0 degrees) and a parallel-pl ate design (theta = 90 degrees). The design topology is verified both analy tically, to show the validity of fundamental effects, and experimentally. E xperimental results show the fabricated device based on the new comb finger design achieves twice the displacement of a standard rectangular comb fing er based device under equal operating conditions, hence demonstrating twice the force generation capability, while at the same time maintaining overal l device stability.