ELECTROPOLISHING OF SILICON USING HYDRAZINE

Authors
SUNDARAM KB DESAI VH
Citation
Kb. Sundaram et Vh. Desai, ELECTROPOLISHING OF SILICON USING HYDRAZINE, Journal of materials science. Materials in electronics, 8(2), 1997, pp. 99-101
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Condensed Matter","Material Science
Journal title
Journal of materials science. Materials in electronics → ACNP
ISSN journal
09574522
Volume
8
Issue
2
Year of publication
1997
Pages
99 - 101
Database
ISI
SICI code
0957-4522(1997)8:2<99:EOSUH>2.0.ZU;2-H
Abstract
A new electropolishing technique has been investigated for polishing s ilicon using aqueous hydrazine. p-Type silicon samples are electropoli shed using this technique and the optimum experimental condition requi red to achieve this is suggested.