In the application of field emitter arrays, it is useful to understand its
emission performance. This paper calculates the electric field of a diode e
mitter array in three-dimensional space. From this calculation, the emissio
n uniformity of a diode array is studied. The dependance of the tip-to-tip
spacing and of the cathode-anode distance on the uniformity of the array is
also analyzed. The pressure sensor based on the diode model is simulated.
From the dependence of the emission current for different tip densities, th
e influence of the emission uniformity can be obtained. (C) 1999 Published
by Elsevier Science B.V. All rights reserved.