RBS analysis of deuterium distribution with coincidence detection of recoil particles

A novel analytical method of deuterium depth distribution is presented for a film target with thickness exceeding a few mu m The method is based on th e Rutherford Backscattering Spectroscopy (RBS) combined with the Elastic Re coil Detection (ERD). The scattered protons are detected coincidentally wit h the recoil deuterons to eliminate protons scattered by substrate and impu rity atoms. Energy of the coincident protons is then analyzed to deduce the deuterium distribution. Results of proof-of-principle experiments using a deuterated polyethylene film and a deuterium implanted titanium sample are presented, and effect of multiple scattering is discussed. The present meth od is applicable for targets with thickness of several mu m which cannot be reached by conventional heavy-ion ERD using MV accelerators, and has an ad vantage that we can avoid deformation of hydrogen isotope distribution caus ed by irradiation of heavy ions. (C) 1999 Elsevier Science B.V. All rights reserved.