Modelling of low-pressure surface wave discharges in flowing oxygen: II. Power dissipation and gas heating

Citation
Mj. Pinheiro et al., Modelling of low-pressure surface wave discharges in flowing oxygen: II. Power dissipation and gas heating, PLASMA SOUR, 8(1), 1999, pp. 31-36
Citations number
22
Categorie Soggetti
Physics
Journal title
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN journal
09630252 → ACNP
Volume
8
Issue
1
Year of publication
1999
Pages
31 - 36
Database
ISI
SICI code
0963-0252(199902)8:1<31:MOLSWD>2.0.ZU;2-U
Abstract
This paper extends the kinetic and gas dynamic model for low-pressure surfa ce wave discharges in flowing oxygen presented in a previous paper to inves tigate the mechanisms of power dissipation and of gas heating in the discha rge. To this end, the gas thermal balance equation is taken into account an d supplements the basic set of equations previously used. A detailed discus sion of the various mechanisms contributing to gas heating is provided. Fro m a comparison of the predicted gas temperature distribution along the plas ma column with measurements, it is concluded that exothermic reactions at t he wall such as reassociation of oxygen atoms and quenching of O-2(b) molec ules may contribute appreciably to gas heating. Such heating mechanisms are shown to be essentially nonlocal due to the long residence time of the inv olved species under the gas flow rates considered here.