Calculation of discharge parameters in low-pressure diode-type radio frequency noble gas plasmas

A self-consistent model of capacitively coupled low-pressure rf discharge i s formulated. The non-local mechanism of electron heating is considered und er simple assumption about the plasma density profile. The transition of el ectron heating from the plasma body to electrode sheaths is observed. The c riterion of a heating mode transition is formulated and expressed in terms of external discharge parameters. The asymptotic solutions for low- and hig h-current regimes are obtained. The comparison of calculation results with experimental data demonstrates the validity of the proposed model for a wid e range of discharge conditions.