Experimental study of pulsed microwave discharges in nitrogen

Citation
M. Baeva et al., Experimental study of pulsed microwave discharges in nitrogen, PLASMA SOUR, 8(1), 1999, pp. 142-150
Citations number
18
Categorie Soggetti
Physics
Journal title
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN journal
09630252 → ACNP
Volume
8
Issue
1
Year of publication
1999
Pages
142 - 150
Database
ISI
SICI code
0963-0252(199902)8:1<142:ESOPMD>2.0.ZU;2-L
Abstract
Investigations on the breakdown and the maintenance phase in a pulsed N-2 m icrowave plasma at 2.45 GHz under low pressure (1-10 mbar) have been carrie d out. The discharge chamber has a cylindrical geometry with a length of 80 mm and a radius of 45 mm. Microwave pulses with a duration of 50-200 mu s and a repetition rate of 10-500 Hz were typical for the experiments. The be haviour of the electric held in the duct has been measured and calculated. The electron number density has been determined using an HCN laser interfer ometer and a Langmuir probe. The microwave power absorbed in the plasma was obtained measuring the forwardly directed and the reflected time resolved power flux. The vibrational excitation of the N-2 molecules in the plasma w as studied with spatial and temporal resolution on the basis of the coheren t anti-Stokes Raman scattering (CARS) technique.