MEPHISTO spectromicroscope reaches 20 nm lateral resolution

Authors
De Stasio, G Perfetti, L Gilbert, B Fauchoux, O Capozi, M Perfetti, P Margaritondo, G Tonner, BP
Citation
G. De Stasio et al., MEPHISTO spectromicroscope reaches 20 nm lateral resolution, REV SCI INS, 70(3), 1999, pp. 1740-1742
Citations number
11
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
REVIEW OF SCIENTIFIC INSTRUMENTS
ISSN journal
00346748 → ACNP
Volume
70
Issue
3
Year of publication
1999
Pages
1740 - 1742
Database
ISI
SICI code
0034-6748(199903)70:3<1740:MSR2NL>2.0.ZU;2-E
Abstract
The recently described tests of the synchrotron imaging photoelectron spect romicroscope MEPHISTO (Microscope a Emission de PHotoelectrons par Illumina tion Synchrotronique de Type Onduleur) were complemented by further resolut ion improvements and tests, which brought the lateral resolution down to 20 nm. Images and line plot profiles demonstrate such performance. (C) 1999 A merican Institute of Physics. [S0034-6748(99)04902-3].