Influence of growth conditions on the formation and luminescence properties of InGaAs quantum dots in a Si matrix

The influence of the growth conditions during molecular-beam epitaxy and of the degree of lattice mismatch between the epilayer and the substrate on t he formation of InGaAs islands on a Si(100) surface is studied. An increase in lattice mismatch (the InAs mole fraction) leads to an increase in the c ritical thickness corresponding to the onset of island growth, in contrast to the formation of InGaAs islands on GaAs(100). An increase in the deposit ion temperature also increases the critical thickness, whereas an increase in the arsenic pressure has the opposite effect. Structures containing an a rray of InGaAs islands in a Si matrix display a luminescence line in the ra nge 1.2 - 1.3 mu m, depending on the mole fraction of InAs. (C) 1999 Americ an Institute of Physics. [S1063-7826(99)00802-9].