The initial interactions of water vapor with polycrystalline titanium surfa
ces were studied at room temperature. Measurements of water vapor surface a
ccumulation were performed in a combined surface analysis system incorporat
ing direct recoils spectrometry (DRS), Auger electron spectroscopy and X-ra
y photoelectron spectroscopy. The kinetics of accommodation of the water di
ssociation fragments (H, O and OH) displayed a complex behavior depending n
ot only on the exposure dose but also on the exposure pressure. For a given
exposure dose the efficiency of chemisorption increased with increasing ex
posure pressure. DRS measurements indicated the occurrence of clustered hyd
roxyl moieties with tilted O-H bonds formed even at very low surface covera
ge. A model which assumes two parallel routes of chemisorption, by direct c
ollisions (Langmuir type) and by a precursor state is proposed to account f
or the observed behavior. The oxidation efficiency of water seemed to be mu
ch lower than that of oxygen. No Ti4+ states were detected even at high wat
er exposure values. It is likely that hydroxyl species play an important ro
le in the reduced oxidation efficiency of water. (C) 1999 Elsevier Science
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