The optical and structural properties of r.f. sputtered CeO2 thin film
s deposited on Pyrex substrates have been studied as a function of sub
strate temperature during deposition. The refractive index, n, extinct
ion coefficient, k, and bandgap of the films were calculated from refl
ectance, R, and transmittance, T, spectra in the wavelength range 340-
900 nm. The refractive index of CeO2 films at 550 nm comprises values
from about 2.25-2.4 depending on the substrate temperature during depo
sition. The extinction coefficient was negligible for wavelength value
s higher than 400 nm. The value obtained for the bandgap was 3.1 eV. T
he X-ray diffraction patterns showed the same (fcc) cubic structure wi
th preferential orientation depending on substrate temperature during
deposition. The scanning force microscope measurements showed that the
roughness and grain size of the CeO2 films increase with increasing s
ubstrate temperature.